In the field of nanotechnology,the importance of high spacital resolution analysis of material further increase.In general, X-ray diffraction method is used to know the atomic structure of the crystal. However, since the diffraction method reflects average strucrure derived fromperiodical structure of crystal, it is difficult to know non-periodic local structure such as crystal defect and interface. On the other hand, since electron microscopy can intuitively know local structure in real space, it is widly used and essential analytical tool in recent nanotechnology field. In addition, the combination with enery dispersive X-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS) can know the information of elemental and electronic state with atomic scale. In our laboratory, we are studing material science with atomic scale and necessary analytical method using (scanning) transmission electron microscopy ((S)TEM) combined with EDS and EELS technique.